The decay of inner-shell vacancy in an atom through radiative andnon-radiative transitions leads to final charged ions. The de-excitation decayof 3s, 3p and 3d vacancies in Kr atoms are calculated using Monte-Carlosimulation method. The vacancy cascade pathway resulted from the de-excitationdecay of deep core hole in 3s subshell in Kr atoms is discussed. The generationof spectator vacancies during the vacancy cascade development gives rise toAuger satellite spectra. The last transitions of the de-excitation decay of 3s,3p and 3d holes lead to specific charged ions. Dirac-Fock-Slater wave functionsare adapted to calculate radiative and non-radiative transition probabilities.The intensity of Kr^{4+} ions are high for 3s hole state, whereas Kr^{3+} andKr^{2+} ions have highest intensities for 3p and 3d hole states, respectively.The present results of ion charge state distributions agree well with theexperimental data.
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